Nanolithography for Ultraviolet Optics (UVDIODE)


Project no.: MIP-067/2015

Project description:

The aim of the project is creation of a manufacturing technology of polymer micro lenses array using advanced nanolithography techniques – 3D e-beam nanolithography and UV nanoimprint lithography. Polymer micro lenses array can be used for InAlGaN UV LEDs in order to enhance the spatial resolution and the beam power density.

Project funding:

Projects funded by the Research Council of Lithuania (RCL), Projects carried out by researchers’ teams

Period of project implementation: 2015-05-01 - 2017-10-31

Project coordinator: Kaunas University of Technology

Viktoras Grigaliūnas

2015 - 2017

Institute of Materials Science

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