“Diamond like carbon films and their nanocomposites: deposition and investigation of the piezoresistive properties”

Author, institution: Andrius Vasiliauskas, Kaunas University of Technology

Science area, field: Physical sciences, Physics

The Doctoral Dissertation is available at the library of Kaunas University of Technology (K. Donelaičio St. 20, Kaunas).

Scientific Supervisor:

Dr. Šarūnas MEŠKINIS (Kaunas University of Technology, Physical sciences, Physics – 02P).

Dissertation defence board of Physics science field:

Prof. Dr. Liutauras MARCINAUSKAS (Kaunas University of Technology, Physical Sciences, Physics – 02P) – chairman,

Dr. Viktoras GRIGALIŪNAS (Kaunas University of Technology, Physical Sciences, Physics – 02P),

Assoc. Prof. Dr. Sandra PRALGAUSKAITĖ (Vilnius University, Physical Sciences, Physics – 02P),

Assoc. Prof. Dr. Živilė RUTKŪNIENĖ (Kaunas University of Technology, Physical Sciences, Physics – 02P),

Assoc. Prof. Dr. Bonifacas VENGALIS (Semiconductor Physics Institute of Center for Physical Sciences and Technology, Physical Sciences, Physics – 02P).

Annotation:

The aim of the work is to deposit piezoresistive diamond like carbon (DLC) and metal nanocomposite films and to study dependence of the structure, composition and electrical properties of these films on deposition conditions as well as possible correlation with piezoresistive properties.
Properties of DLC can be controlled by introducing metal in the film. Using magnetron sputtering DLC with metal inclusions can be deposited. This method is relevant because magnetron sputtering is already popular in industry. It is used to deposit metal films. DLC with metal inclusions has other benefits. Generalizing arguments provided above DLC is very promising piezoresistive material.
DLC is perceived as a conductive clusters surrounded by a dielectric sp3 matrix. The distance between adjacent clusters during stretching increases and compressing decreases. Accordingly, the resistance should increase or decrease. Then main parameters are geometric diameter of sp2 cluster and the distance between adjacent sp2 clusters. It is possible to change sp2/sp3 ratio and the size of sp2 clusters by changing DLC deposition parameters. In such a way piezoresistive properties of DLC can be changed, too. Piezoresistive gauge factor should increase with reduction of sp2 cluster size and increase of the amount of sp3 bonded carbon. However there is lack of the comprehensive and systematic studies on that matter.